Strategic analysis of innovative laser interference lithography technology using claim-based patent informatics
نویسندگان
چکیده
منابع مشابه
Investigation on fabrication of nanoscale patterns using laser interference lithography.
Nanoscale patterns are fabricated by laser interference lithography (LIL) using Lloyd's mirror interferometer. LIL provides a patterning technology with simple, quick process over a large area without the usage of a mask. Effects of various key parameters for LIL, with 257 nm wavelength laser, are investigated, such as the exposure dosage, the half angle of two incident beams at the intersectio...
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ژورنال
عنوان ژورنال: Cogent Engineering
سال: 2016
ISSN: 2331-1916
DOI: 10.1080/23311916.2016.1240054